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Hot-wire chemical vapour deposition of nanocrystalline silicon and silicon nitride : growth mechanisms and filament stability
(University of the Western Cape, 2012)
Nanocrystalline silicon (nc-Si:H) is an interesting type of silicon with superior
electrical properties that are more stable compared to amorphous silicon (a-Si:H).
Silicon nitride (SiNₓ) thin films are currently the ...