Browsing Magister Scientiae - MSc (Physics) by Author "Adams, Abdulghaaliq"
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Hot-wire chemical vapor deposition of silicon nitride thin films
Adams, Abdulghaaliq (2013)Amorphous silicon nitride (a-SiN:H) thin films has a multitude of applications, stemming from the tunability of the material properties. Plasma enhanced chemical vapour deposition (PECVD) is the industrial workhorse for ...